Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1993 / 3 Vol. 11; Iss. 2
Variation of internal stresses in sputtered Ta films
Yoshihara, TakuyaVolume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586674
Date:
March, 1993
File:
PDF, 456 KB
english, 1993