Variation of internal stresses in sputtered Ta films

Variation of internal stresses in sputtered Ta films

Yoshihara, Takuya
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586674
Date:
March, 1993
File:
PDF, 456 KB
english, 1993
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