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[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - In Situ Tensile Strength Measurement Of Thick-film And Thin Film Micromacrined Structures
Greek, S., Ericson, F., Johausson, S., Schweitz, J.Volume:
2
Year:
1995
Language:
english
DOI:
10.1109/sensor.1995.721743
File:
PDF, 1.11 MB
english, 1995