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Thermal desorption spectra of SiO[sub 2] films deposited on Si and on thermal SiO[sub 2] by tetraethylorthosilicate/O[sub 3] atmospheric-pressure chemical vapor deposition
Cheng, Degang, Tsukamoto, Koji, Komiyama, Hiroshi, Nishimoto, Yuko, Tokumasu, Noboru, Maeda, KazuoVolume:
85
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.370525
File:
PDF, 340 KB
english, 1999