Observation of metal–oxide–semiconductor transistor...

Observation of metal–oxide–semiconductor transistor operation using scanning capacitance microscopy

Nakakura, C. Y., Hetherington, D. L., Shaneyfelt, M. R., Shea, P. J., Erickson, A. N.

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Volume:

Year:

1999

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.125002

File:

PDF, 565 KB

english, 1999

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