Self-forming Mn-based diffusion barriers on low-...

Japanese Journal of Applied Physics 2014 / 08 Vol. 53; Iss. 8S3

Self-forming Mn-based diffusion barriers on low- k substrates

Park, Jae-Hyung, Han, Dong-Suk, Kang, You-Jin, Shin, So-Ra, Choi, Duck-Kyun, Park, Hee-Yull, Park, Jong-Wan
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.08NL01
Date:
August, 2014
File:
PDF, 860 KB
english, 2014
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