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A Nb/AlOx/Nb trilayer process for the fabrication of X-ray detectors
S.P. Zhao, F. Finkbeiner, Ph. Lerch, A. Jaggi, A. Zehnder, H.R. OttVolume:
214
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0921-4534(93)90836-f
File:
PDF, 395 KB
english, 1993