[IEEE 2008 IEEE 21st International Conference on Micro...

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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Prediction of fatigue lifetime based on static strength and crack extension law - Fatigue test of mems materials becomes unnecessary

Kawai, T., Amaki, S., Gaspar, J., Ruther, P., Paul, O., Kamiya, S.
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Year:
2008
Language:
english
DOI:
10.1109/memsys.2008.4443685
File:
PDF, 395 KB
english, 2008
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