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Adapting optimal control theory and using learning loops to provide experimentally feasible shaping mask patterns
Hornung, Thomas, Motzkus, Marcus, de Vivie-Riedle, ReginaVolume:
115
Year:
2001
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.1378817
File:
PDF, 526 KB
english, 2001