Optimization of amorphous TiOx-based thin film transistors fabricated by dc magnetron sputtering
Choi, Kwang-Hyuk, Kim, Han-KiVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4736932
File:
PDF, 2.94 MB
english, 2012