Effects of substrate temperature on properties of pulsed dc...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2005 Vol. 23; Iss. 3

Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films

Jain, Pushkar, Juneja, Jasbir S., Bhagwat, Vinay, Rymaszewski, Eugene J., Lu, Toh-Ming, Cale, Timothy S.
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1897700
File:
PDF, 449 KB
english, 2005
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