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[IEEE 2007 Canadian Conference on Electrical and Computer Engineering - Vancouver, BC, Canada (2007.04.22-2007.04.26)] 2007 Canadian Conference on Electrical and Computer Engineering - Polymethylglutarimide As a Structural MEMS Material
Foulds, I. G., Johnstone, R. W., Hamidi, M., Tsang, S., Parameswaran, M.Year:
2007
Language:
english
DOI:
10.1109/ccece.2007.81
File:
PDF, 7.22 MB
english, 2007