[IEEE 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2012.09.19-2012.09.21)] 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Failure mechanism and improvement on gate oxide failure at the edge of LOCOS
Ying, Lesley Wong Ying, Pal, Deb Kumar, Tan, Raymond, Seng, Ng Hong, Ong, Michaelina, Hong, Tong Gee, Sang, Wong JianYear:
2012
Language:
english
DOI:
10.1109/smelec.2012.6417214
File:
PDF, 748 KB
english, 2012