In situ investigation of the amorphous silicon/silicon...

In situ investigation of the amorphous silicon/silicon nitride interfaces by spectroellipsometry

Stchakovsky, M., Drévillon, B., Cabarrocas, P. Roca i
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Volume:
70
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.349450
File:
PDF, 672 KB
english, 1991
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