Search for pressure dependence in the sensitivity of several common types of hot-cathode ionization gauges for total pressures down to 10−7 Pa
Filippelli, Albert R.Volume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577195
Date:
September, 1991
File:
PDF, 1.01 MB
english, 1991