[IEEE 2009 Ph.D. Research in Microelectronics and Electronics (PRIME) - Cork, Ireland (2009.07.12-2009.07.17)] 2009 Ph.D. Research in Microelectronics and Electronics - A new approach for CMOS-compatible fabrication of cantilever/tip systems for probe-storage applications
Lazzerini, G. M., Surdo, S., Barillaro, G.Year:
2009
Language:
english
DOI:
10.1109/rme.2009.5201353
File:
PDF, 2.19 MB
english, 2009