Morphological and compositional changes of the target surface during RF magnetron sputtering of the Y-Ba-Cu-O system
R.A. Chakalov, M.V. AbrashevVolume:
223
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0921-4534(94)90710-2
File:
PDF, 453 KB
english, 1994