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[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Thermal budget reduction and throughput enhancement for CMOS Epi stressors via wet clean interface contamination evaluation and control
Brabant, Paul, Chung, Keith, Shinriki, Manabu, Hasaka, Scott, Scott, Dane, Wirzbicki, Mark, Francis, Terry, He, Hong, Sadana, Devendra KYear:
2011
Language:
english
DOI:
10.1109/asmc.2011.5898202
File:
PDF, 224 KB
english, 2011