Process monitoring of spin-valve GMR deposition
Kools, J.C.S., Paranjpe, L., Schwartz, P., Bubber, R., Bergner, B., Kula, W., Rijks, T.G.S.M.Volume:
34
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.706322
Date:
July, 1998
File:
PDF, 341 KB
english, 1998