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Impact dynamics of micromachined bidirectional electrothermal vibromotors
Shih, Wen-Pin, Pai, Minfan, Lin, Yu-Yun, Hui, Chung-Yuen, Tien, Norman C.Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1805725
File:
PDF, 490 KB
english, 2004