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[IEEE 2010 IEEE Nanotechnology Materials and Devices Conference (NMDC) - Monterey, CA, USA (2010.10.12-2010.10.15)] 2010 IEEE Nanotechnology Materials and Devices Conference - Nanostructured VO2 film coatings for tunable MEMS resonators
Merced, Emmanuelle, Cabrera, Rafmag, Suarez, Ramon, Fernandez, Felix E., Sepulveda, NelsonYear:
2010
Language:
english
DOI:
10.1109/nmdc.2010.5652371
File:
PDF, 1.28 MB
english, 2010