Angular distribution of the sputtered atoms from TbFeCo...

Angular distribution of the sputtered atoms from TbFeCo targets

Chao, Shiuh, Jeng, Tzuan-Ren, Lo, Vien-Shien, Huang, Der-Ray, Hsiao, Tsai-Chu
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Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354237
File:
PDF, 845 KB
english, 1993
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