Influence of surface adsorption in improving ultrashallow junction formation
Vaidyanathan, Ramakrishnan, Seebauer, Edmund G., Graoui, Houda, Foad, Majeed A.Volume:
89
Year:
2006
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2360917
File:
PDF, 313 KB
english, 2006