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Role of surface intermediates in enhanced, uniform growth rates of TiO2 atomic layer deposition thin films using titanium tetraisopropoxide and ozone
Cleveland, Erin R., Henn-Lecordier, Laurent, Rubloff, Gary W.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3669522
File:
PDF, 934 KB
english, 2012