Role of surface intermediates in enhanced, uniform growth...

Role of surface intermediates in enhanced, uniform growth rates of TiO2 atomic layer deposition thin films using titanium tetraisopropoxide and ozone

Cleveland, Erin R., Henn-Lecordier, Laurent, Rubloff, Gary W.
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3669522
File:
PDF, 934 KB
english, 2012
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