Mechanical properties of Al[sub x]Ga[sub 1−x]N films with...

Mechanical properties of Al[sub x]Ga[sub 1−x]N films with high Al composition grown on AlN/sapphire templates

Xu, F. J., Shen, B., Wang, M. J., Xu, J., Lu, L., Miao, Z. L., Yang, Z. J., Qin, Z. X., Zhang, G. Y., Lin, B., Bai, S. L.

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Volume:

Year:

2007

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.2735551

File:

PDF, 373 KB

english, 2007

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