Handbook of Silicon Based MEMS Materials and Technologies...

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Handbook of Silicon Based MEMS Materials and Technologies || Properties of Silicon Crystals

Paloheimo, Jari
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Year:
2010
Language:
english
DOI:
10.1016/B978-0-8155-1594-4.00003-6
File:
PDF, 1.50 MB
english, 2010
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