Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1991 / 1 Vol. 9; Iss. 1
A high vacuum system for laser induced deposition of tungsten
van Maaren, A. J. P.Volume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585794
Date:
January, 1991
File:
PDF, 900 KB
english, 1991