A high vacuum system for laser induced deposition of...

A high vacuum system for laser induced deposition of tungsten

van Maaren, A. J. P.
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Volume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585794
Date:
January, 1991
File:
PDF, 900 KB
english, 1991
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