[IEEE 2009 International Semiconductor Device Research...

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[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Effect of pre-cleaning on the formation of low resistance Ni-silicide from atomic layer deposited nickel film

Jong-Bong Ha,, Hee-Sung Kang,, Sung-Gil Lee,, Jung-Hee Lee,
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Year:
2009
Language:
english
DOI:
10.1109/isdrs.2009.5378339
File:
PDF, 662 KB
english, 2009
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