![](/img/cover-not-exists.png)
[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Effect of pre-cleaning on the formation of low resistance Ni-silicide from atomic layer deposited nickel film
Jong-Bong Ha,, Hee-Sung Kang,, Sung-Gil Lee,, Jung-Hee Lee,Year:
2009
Language:
english
DOI:
10.1109/isdrs.2009.5378339
File:
PDF, 662 KB
english, 2009