New fabrication process for josephson tunnel junctions...

IEEE Transactions on Appiled Superconductivity 2003 / 06 Vol. 13; Iss. 2

New fabrication process for josephson tunnel junctions using photosensitive polyimide insulation layer for superconducting integrated circuits

Kikuchi, K., Segawa, S., Eun-Sil Jung,, Nakagawa, H., Tokoro, K., Itatani, H., Aoyagi, M.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.813660
Date:
June, 2003
File:
PDF, 620 KB
english, 2003
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