Site-selective electroless plating on amino-terminated diamond substrate patterned by 126 nm vacuum ultraviolet light lithography
Hozumi, Atsushi, Asakura, Shuichi, Fuwa, Akio, Shirahata, NaotoVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1863937
File:
PDF, 564 KB
english, 2005