Properties of laser-assisted doping in silicon

Applied Physics Letters 1978 Vol. 33; Iss. 2

Properties of laser-assisted doping in silicon

Affolter, K., Lüthy, W., von Allmen, M.
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Volume:
33
Year:
1978
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.90302
File:
PDF, 479 KB
english, 1978
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