Kinetics and mechanism for desorption of H2O from...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1993 / 5 Vol. 11; Iss. 3

Kinetics and mechanism for desorption of H2O from spin-on-glass

Tompkins, Harland G.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586779
Date:
May, 1993
File:
PDF, 1011 KB
english, 1993
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