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[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Effects of thermal annealing in ion-implanted Gallium Nitride
Iucolano, F., Giannazzo, F., Roccaforte, F., Puglisi, V., Grimaldi, M. G., Raineri, V.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383837
File:
PDF, 558 KB
english, 2007