[IEEE IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012) - Portland, OR, USA (30 July-3 Aug. 1995)] IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012) - Microrelay matrices based on electrostatic operation principle
Grigoriscin, I.L., Mukhurov, N.I.Year:
1995
Language:
english
DOI:
10.1109/ivmc.1995.487073
File:
PDF, 175 KB
english, 1995