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Characterization of micromechanical optical modulator
Huibing Mao,, Jinghua Ke,, Peisheng Xing,, Zongsheng Lai,Volume:
10
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.967382
Date:
January, 2001
File:
PDF, 83 KB
english, 2001