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Compact electron cyclotron resonance plasma source
Gaudin, C., Hay, L., Buzzi, J. M., Bacal, M., Lamoureux, M.Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148584
File:
PDF, 371 KB
english, 1998