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Relationship between fluence gradient and lateral grain growth in spatially controlled excimer laser crystallization of amorphous silicon films
Lee, Minghong, Moon, Seungjae, Hatano, Mutsuko, Suzuki, Kenkichi, Grigoropoulos, Costas P.Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1314303
File:
PDF, 919 KB
english, 2000