[IEEE Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (2005.10.25-2005.10.28)] Digest of Papers Microprocesses and Nanotechnology 2005 - Design and fabrication of a MEMS-based electrolytic tilt sensor
Ik-Su Kang,, Ho Jung,, Dong-Sun Kim,, Byong-Jo Kwon,, Chang Jin Kim,, Woo-Jeong Kim,, Sie-Young Choi,, Jong-Hyun Lee,, Jang-Kyoo Shin,, Seong Ho Kong,Year:
2005
Language:
english
DOI:
10.1109/imnc.2005.203815
File:
PDF, 771 KB
english, 2005