Effects of Hf contamination on the properties of silicon...

Effects of Hf contamination on the properties of silicon oxide metal–oxide–semiconductor devices

Kang, Chang Seok, Onishi, Katsunori, Kang, Laegu, Lee, Jack C.
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Volume:
81
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1532755
File:
PDF, 297 KB
english, 2002
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