One-step formation of nanostructures on silicon surfaces...

physica status solidi (a) 2014 / 01 Vol. 211; Iss. 1

One-step formation of nanostructures on silicon surfaces using pure hydrogen-radical-initiated reactions

Nagayoshi, Hiroshi, Diplas, Spyros, ChariesWalmsley, John, Andersen, Niels H., Karlsson, Arne, Graff, Joachim Seland, Chirvony, Vladimir, Pastor, Juan M., Ulyashin, Alexander
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Volume:
211
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201330220
Date:
January, 2014
File:
PDF, 569 KB
english, 2014
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