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High density plasma oxide etching using nitrogen...

High density plasma oxide etching using nitrogen trifluoride and acetylene

Pruette, Laura, Karecki, Simon, Chatterjee, Ritwik, Reif, Rafael, Sparks, Terry, Vartanian, Victor
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1290373
File:
PDF, 912 KB
english, 2000
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