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Analysis of a microelectromechanical system testing stage for tensile loading of nanostructures
Lu, Shaoning, Guo, Zaoyang, Ding, Weiqiang, Ruoff, Rodney S.Volume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2198789
File:
PDF, 522 KB
english, 2006