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Resistivity of linear scratches in doped (100) n-type single-crystal silicon
Danyluk, Steven, Lee, Soo-Wohn, Ahn, Ji-Hong, Kahn, ArnoldVolume:
63
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.340156
File:
PDF, 700 KB
english, 1988