A transmission electron microscope investigation of the dose dependence of the microstructure of silicon-on-insulator structures formed by nitrogen implantation of silicon
Meekison, C. D., Booker, G. R., Reeson, K. J., Hemment, P. L. F., Peart, R. F., Chater, R. J., Kilner, J. A., Davis, J. R.Volume:
69
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.348491
File:
PDF, 1.40 MB
english, 1991