[IEEE 1995 Japan International Electronic Manufacturing Technology Symposium - Omiya, Japan (4-6 Dec. 1995)] Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium - High-speed, high-quality thinning processes of GaAs wafers for high-power FETs
Ohmori, H., Karaki Doy, T., Nakagawa, T.Year:
1996
Language:
english
DOI:
10.1109/iemt.1995.541065
File:
PDF, 716 KB
english, 1996