[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Optimization of resist strip recipe for aluminum metal etch processes
Mammo, E.G., Singh, N., Mananquil, C., Myers, D.R.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001637
File:
PDF, 401 KB
english, 2002