Infrared fingerprints and periodic formation of...

Infrared fingerprints and periodic formation of nanoparticles in Ar/C[sub 2]H[sub 2] plasmas

Kovačević, Eva, Stefanović, Ilija, Berndt, Johannes, Winter, Jörg
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Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1541118
File:
PDF, 446 KB
english, 2003
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