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Preparation of silicon oxynitride and nitride by nitridation of amorphous silica in ammonia
Petar Petrovski, Hrustem Smailhodžić, Snježana MarićVolume:
109
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0921-5093(89)90598-4
File:
PDF, 313 KB
english, 1989