Effect of Segmenting Powered Electrode on Plasma Uniformity...

IEEE Transactions on Plasma Science 2011 / 11 Vol. 39; Iss. 11

Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

Chen, Zhigang, Kenney, Jason, Rauf, Shahid, Collins, Ken, Tanaka, Tom, Hammond, Ned, Kudela, Jozef
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Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2157118
Date:
November, 2011
File:
PDF, 245 KB
english, 2011
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