Mechanical characterization by acoustic techniques of SiC chemical-vapour-deposited thin films
J.M. Saurel, K. Alami, C.Amaudric du Chaffaut, O. Dugne, A. GuetteVolume:
122
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0921-5093(89)90766-1
File:
PDF, 349 KB
english, 1989