Simulations of BCl[sub 3]/Cl[sub 2] plasma in an inductively coupled gaseous reference cell
Choi, Seung J.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581121
Date:
May, 1998
File:
PDF, 414 KB
english, 1998